Anotace přednášek

ČESKÁ VAKUOVÁ SPOLEČNOST a IUVSTA
(International Union for Vacuum Science, Technique and Applications)
LETNÍ ŠKOLA VAKUOVÉ TECHNIKY 2016
ve dnech 30. května až 2. června 2016
v hotelu Kraví Hora v Bořeticích na jižní Moravě
Téma letní školy: Nízkotlaké plazmové technologie a procesy II
Upozornění : přestože jsou anotace přednášek z důvodu žádosti o podporu IUVSTA v anglickém
jazyce, celá letní škola probíhá v češtině
Přednášející:
Jan Benedikt
Research Department Plasmas with Complex Interactions, Ruhr-University, 44780 Bochum, Germany
Jiří Čapek
Fakulta aplikovaných věd a NTIS - European Centre of Excellence, Západočeská univerzita v Plzni
Michal Fárník
Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha
František Krčma,
Fakulta chemická, VUT v Brně
Anna Macková
Ústav jaderné fyziky AVČR, v. v. i., Řež u Prahy a Přírodovědecká fakulta UJEP, Ústí nad Labem
Pavel Slavíček
Přírodovědecká fakulta Masarykovy university v Brně
Patrik Španěl
Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha
David Trunec
Přírodovědecká fakulta Masarykovy university v Brně
Anotace přednášek: (v abecedním pořadí podle autora)
Kvadrupólová hmotnostní spektrometrie reaktivního plazmatu
Quadrupole mass spectrometry of reactive plasmas
Jan Benedikt
Research Department Plasmas with Complex Interactions, Ruhr-University, 44780 Bochum, Germany
Mass spectrometry (MS) is a very versatile diagnostic method, which has, therefore, a prominent role
in the characterization of reactive plasmas. It can access almost all plasma generated species: stable
gas-phase products, reactive radicals, positive and negative ions or even internally excited species
such as metastables. It can provide absolute densities of neutral particles or energy distribution
functions of energetic ions. In particular, plasmas with a rich chemistry, such as hydrocarbon plasmas,
could not be understood without MS. This review focuses on quadrupole MS with an electron impact
ionization ion source as the most common MS technique applied in plasma analysis. Necessary
information for the understanding of this diagnostic and its application and for the proper design and
calibration procedure of an MS diagnostic system for quantitative plasma analysis is provided.
Important differences between measurements of neutral particles and energetic ions and between
the analysis of low pressure and atmospheric pressure plasmas will be discussed.
Principy a aplikace reaktivní magnetronové depozice
The principles and application of reactive magnetron deposition
Jiří Čapek
Fakulta aplikovaných věd a NTIS - European Centre of Excellence, Západočeská univerzita v Plzni
The lecture offers a discussion of basic principles and issues in reactive sputter deposition of
conducting and insulating thin films. Consequently, various deposition approaches used in reactive
sputtering – dc, rf, magnetron, pulsed dc, and high power impulse magnetron sputtering (HiPIMS) are
discussed and compared. Moreover, process control strategies (e.g.: flow rate, partial pressure, and
target voltage) and their implementation are described in detail.
Elementární fyzikálně chemické procesy studované v molekulárních svazcích
Elementary chemical and physical processes studied in molecular beams
Michal Fárník
Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha
When molecules in the gas phase are expanded through a small nozzle into a high vacuum, under
certain conditions molecular beams are generated. Clusters of molecules isolated in these molecular
beams in vacuum represent ideal tool for investigations of elementary physical and chemical
processes at detailed molecular level. In this talk, the molecular beam method will be introduced. In
our laboratory, the clusters and free nanoparticles are investigated using a variety of laserspectroscopic and mass-spectrometric methods. These methods will be introduced in the talk too.
Finally, some examples of various cluster studies will be present, e.g. clusters relevant to atmospheric
chemistry and ozone hole generation.
Fyzika a chemie nízkotlakého plazmatu a jeho aplikace
Low pressure plasma physics and chemistry: Fundamentals and applications
Frantisek Krčma,
Fakulta chemická, VUT v Brně
The introduction lecture will start by a brief review of plasma as the fourth state of matter, plasma
elementary processes like effective cross sections, electron energy distribution function, Debye
diffusion length, temperatures of various species (especially in non-equilibrium cases), etc. The stress
on various reactive species generation like ions and radicals and excited species will be presented
with link to the non-equilibrium bulk and surface chemistry. The possible low pressure plasma
discharge systems and electrode configurations applicable for laboratory processes and technologies
will be reviewed. Finally, the selected industrial applications like thin films and hard coatings
deposition, surface treatment, nanoparticles and nanostructures synthesis, plasma TV, etc. will be
presented.
Modifikace materiálů pro optiku, elektroniku a spintroniku iontovým svazkem – iontová implantace
pomocí urychlovačů nebo laserem indukovaného plazmatu
Ion beam modification of materials for optics, electronic and spintronics - ion implantation using
accelerators or laser induced plasma ion generation
Anna Macková
Ústav jaderné fyziky AVČR, v. v. i., Řež u Prahy a Přírodovědecká fakulta UJEP, Ústí nad Labem
Ion beam modification offers a broad field of the creating the new functional materials and nanostructures for optics, electronics, spintronics and other material branches. Using ions produced by ion
accelerators or implanters means the usage of the monoenergetic beams for precise doped layer,
nano-particles or cluster creation by varying the ion implantation specie versus matrix combination
together with the implantation energy, ion flux etc. Recently appears the multienergetic ion
implantation which is realized by using of the intense laser shot generating plasma from the specially
designed targets, where the ions are accelerated and can be then implanted into the various
materials. This contribution will present an overview and comparison of different ion beam
modification techniques, plasma ion implantation will be also mentioned.
Optická emisní spektroskopie ve fyzice plazmatu
Optical emission spectroscopy in plasma physics
Pavel Slavíček
Přírodovědecká fakulta Masarykovy university v Brně
One of basic diagnostics method for plasma physics is optical emission spectroscopy. This method
uses light emission from excitation atoms and molecules. This diagnostics allows determine different
parameters of plasma sources - composition of plasma, rotational, vibrational and electron
temperature, concentration of electrons etc. Optical emission spectroscopy does not affect examined
plasma source that is big advantage of this method. In this lecture I will present basic information
about optical emission spectroscopy as a tool for plasma diagnostics. Typical construction of
spectrometers and detectors, methods of calibration and spectra evaluation will be shown. Examples
of emission spectra from real plasma sources will be presented too.
Hmotnostní spektrometrie stopových koncentrací těkavých látek ve vzduchu a dechu měřených
pomocí nízkotlakých výbojů
Mass spectrometry for real time measurement of trace concentrations of volatile compounds in air
and breath utilizing low pressure discharges
Patrik Španěl
Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha
The need for rapid and accurate measurement of trace concentrations of compounds present in air
and human breath has led to construction of specialized mass spectrometers based on the Selected
Ion Flow Tube Mass Spectrometry, SIFT-MS, and Proton Transfer Mass Spectrometry, PTR-MS. It is
possible currently to analyze vapors of volatile organic compounds and other gases including
ammoniac, hydrogen sulphide or hydrogen cyanide present in concentrations as low as a part per
billion by volume (ppbv). Vacuum technology is important in these instruments not only to facilitate
the function of the mass analyzers but also to allow formation of the reagent ions in electrical
discharges and to define the accurate reaction time of the ion-molecule reactions that take place with
analyte molecules in the sample at pressures 1 – 2 mbar. The lecture will outline to construction and
principle of operation of these instruments and also present interesting examples of their use
including clinical breath analysis.
Diagnostika Plazmatu Langmuirovou sondou
Langmuir probe diagnostics of plasmas
David Trunec
Přírodovědecká fakulta Masarykovy university v Brně
The measurements with electric probes belong to the oldest as well as to the most often used
procedures of the low-temperature plasma diagnostics. The method has been developed by Langmuir
and his co-workers in the twenties. Since then it has been subject to many extensions and further
development in order to extend its applicability to more general conditions in comparison to the one
presumed by Langmuir. Such investigations proceeded continuously and the research on extension of
applicability of Langmuir probe diagnostics continues also in the present time. The method of the
Langmuir probe measurements is based on the estimation of the current-voltage characteristic - the
so-called „probe characteristic“ - of the circuit consisting of two metallic electrodes that are both
immersed into the plasma under study.
Langmuir probe diagnostics are a powerful tool due to their simplicity, inexpensiveness, easy
adaptiveness to specific needs, the ability to perform local measurements of electron distribution
function and plasma potential at a good time resolution (~ 10-8 s), and also the technical possibility to
obtain the requested results quickly in the range of plasma density 103 – 1014 cm-3 with an average
electron energy from 0.025 eV to hundreds of eV.