Anotace přednášek
Transkript
Anotace přednášek
ČESKÁ VAKUOVÁ SPOLEČNOST a IUVSTA (International Union for Vacuum Science, Technique and Applications) LETNÍ ŠKOLA VAKUOVÉ TECHNIKY 2016 ve dnech 30. května až 2. června 2016 v hotelu Kraví Hora v Bořeticích na jižní Moravě Téma letní školy: Nízkotlaké plazmové technologie a procesy II Upozornění : přestože jsou anotace přednášek z důvodu žádosti o podporu IUVSTA v anglickém jazyce, celá letní škola probíhá v češtině Přednášející: Jan Benedikt Research Department Plasmas with Complex Interactions, Ruhr-University, 44780 Bochum, Germany Jiří Čapek Fakulta aplikovaných věd a NTIS - European Centre of Excellence, Západočeská univerzita v Plzni Michal Fárník Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha František Krčma, Fakulta chemická, VUT v Brně Anna Macková Ústav jaderné fyziky AVČR, v. v. i., Řež u Prahy a Přírodovědecká fakulta UJEP, Ústí nad Labem Pavel Slavíček Přírodovědecká fakulta Masarykovy university v Brně Patrik Španěl Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha David Trunec Přírodovědecká fakulta Masarykovy university v Brně Anotace přednášek: (v abecedním pořadí podle autora) Kvadrupólová hmotnostní spektrometrie reaktivního plazmatu Quadrupole mass spectrometry of reactive plasmas Jan Benedikt Research Department Plasmas with Complex Interactions, Ruhr-University, 44780 Bochum, Germany Mass spectrometry (MS) is a very versatile diagnostic method, which has, therefore, a prominent role in the characterization of reactive plasmas. It can access almost all plasma generated species: stable gas-phase products, reactive radicals, positive and negative ions or even internally excited species such as metastables. It can provide absolute densities of neutral particles or energy distribution functions of energetic ions. In particular, plasmas with a rich chemistry, such as hydrocarbon plasmas, could not be understood without MS. This review focuses on quadrupole MS with an electron impact ionization ion source as the most common MS technique applied in plasma analysis. Necessary information for the understanding of this diagnostic and its application and for the proper design and calibration procedure of an MS diagnostic system for quantitative plasma analysis is provided. Important differences between measurements of neutral particles and energetic ions and between the analysis of low pressure and atmospheric pressure plasmas will be discussed. Principy a aplikace reaktivní magnetronové depozice The principles and application of reactive magnetron deposition Jiří Čapek Fakulta aplikovaných věd a NTIS - European Centre of Excellence, Západočeská univerzita v Plzni The lecture offers a discussion of basic principles and issues in reactive sputter deposition of conducting and insulating thin films. Consequently, various deposition approaches used in reactive sputtering – dc, rf, magnetron, pulsed dc, and high power impulse magnetron sputtering (HiPIMS) are discussed and compared. Moreover, process control strategies (e.g.: flow rate, partial pressure, and target voltage) and their implementation are described in detail. Elementární fyzikálně chemické procesy studované v molekulárních svazcích Elementary chemical and physical processes studied in molecular beams Michal Fárník Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha When molecules in the gas phase are expanded through a small nozzle into a high vacuum, under certain conditions molecular beams are generated. Clusters of molecules isolated in these molecular beams in vacuum represent ideal tool for investigations of elementary physical and chemical processes at detailed molecular level. In this talk, the molecular beam method will be introduced. In our laboratory, the clusters and free nanoparticles are investigated using a variety of laserspectroscopic and mass-spectrometric methods. These methods will be introduced in the talk too. Finally, some examples of various cluster studies will be present, e.g. clusters relevant to atmospheric chemistry and ozone hole generation. Fyzika a chemie nízkotlakého plazmatu a jeho aplikace Low pressure plasma physics and chemistry: Fundamentals and applications Frantisek Krčma, Fakulta chemická, VUT v Brně The introduction lecture will start by a brief review of plasma as the fourth state of matter, plasma elementary processes like effective cross sections, electron energy distribution function, Debye diffusion length, temperatures of various species (especially in non-equilibrium cases), etc. The stress on various reactive species generation like ions and radicals and excited species will be presented with link to the non-equilibrium bulk and surface chemistry. The possible low pressure plasma discharge systems and electrode configurations applicable for laboratory processes and technologies will be reviewed. Finally, the selected industrial applications like thin films and hard coatings deposition, surface treatment, nanoparticles and nanostructures synthesis, plasma TV, etc. will be presented. Modifikace materiálů pro optiku, elektroniku a spintroniku iontovým svazkem – iontová implantace pomocí urychlovačů nebo laserem indukovaného plazmatu Ion beam modification of materials for optics, electronic and spintronics - ion implantation using accelerators or laser induced plasma ion generation Anna Macková Ústav jaderné fyziky AVČR, v. v. i., Řež u Prahy a Přírodovědecká fakulta UJEP, Ústí nad Labem Ion beam modification offers a broad field of the creating the new functional materials and nanostructures for optics, electronics, spintronics and other material branches. Using ions produced by ion accelerators or implanters means the usage of the monoenergetic beams for precise doped layer, nano-particles or cluster creation by varying the ion implantation specie versus matrix combination together with the implantation energy, ion flux etc. Recently appears the multienergetic ion implantation which is realized by using of the intense laser shot generating plasma from the specially designed targets, where the ions are accelerated and can be then implanted into the various materials. This contribution will present an overview and comparison of different ion beam modification techniques, plasma ion implantation will be also mentioned. Optická emisní spektroskopie ve fyzice plazmatu Optical emission spectroscopy in plasma physics Pavel Slavíček Přírodovědecká fakulta Masarykovy university v Brně One of basic diagnostics method for plasma physics is optical emission spectroscopy. This method uses light emission from excitation atoms and molecules. This diagnostics allows determine different parameters of plasma sources - composition of plasma, rotational, vibrational and electron temperature, concentration of electrons etc. Optical emission spectroscopy does not affect examined plasma source that is big advantage of this method. In this lecture I will present basic information about optical emission spectroscopy as a tool for plasma diagnostics. Typical construction of spectrometers and detectors, methods of calibration and spectra evaluation will be shown. Examples of emission spectra from real plasma sources will be presented too. Hmotnostní spektrometrie stopových koncentrací těkavých látek ve vzduchu a dechu měřených pomocí nízkotlakých výbojů Mass spectrometry for real time measurement of trace concentrations of volatile compounds in air and breath utilizing low pressure discharges Patrik Španěl Ústav fyzikální chemie J. Heyrovského AV ČR, v.v.i., Praha The need for rapid and accurate measurement of trace concentrations of compounds present in air and human breath has led to construction of specialized mass spectrometers based on the Selected Ion Flow Tube Mass Spectrometry, SIFT-MS, and Proton Transfer Mass Spectrometry, PTR-MS. It is possible currently to analyze vapors of volatile organic compounds and other gases including ammoniac, hydrogen sulphide or hydrogen cyanide present in concentrations as low as a part per billion by volume (ppbv). Vacuum technology is important in these instruments not only to facilitate the function of the mass analyzers but also to allow formation of the reagent ions in electrical discharges and to define the accurate reaction time of the ion-molecule reactions that take place with analyte molecules in the sample at pressures 1 – 2 mbar. The lecture will outline to construction and principle of operation of these instruments and also present interesting examples of their use including clinical breath analysis. Diagnostika Plazmatu Langmuirovou sondou Langmuir probe diagnostics of plasmas David Trunec Přírodovědecká fakulta Masarykovy university v Brně The measurements with electric probes belong to the oldest as well as to the most often used procedures of the low-temperature plasma diagnostics. The method has been developed by Langmuir and his co-workers in the twenties. Since then it has been subject to many extensions and further development in order to extend its applicability to more general conditions in comparison to the one presumed by Langmuir. Such investigations proceeded continuously and the research on extension of applicability of Langmuir probe diagnostics continues also in the present time. The method of the Langmuir probe measurements is based on the estimation of the current-voltage characteristic - the so-called „probe characteristic“ - of the circuit consisting of two metallic electrodes that are both immersed into the plasma under study. Langmuir probe diagnostics are a powerful tool due to their simplicity, inexpensiveness, easy adaptiveness to specific needs, the ability to perform local measurements of electron distribution function and plasma potential at a good time resolution (~ 10-8 s), and also the technical possibility to obtain the requested results quickly in the range of plasma density 103 – 1014 cm-3 with an average electron energy from 0.025 eV to hundreds of eV.